Advanced logic scaling has created some difficult technical challenges, including a requirement for highly dense patterning. Imec recently confronted this challenge, by working toward the use of Metal ...

Technology progression within advanced process control (APC) continues to evolve; however, it is the relationship among core APC developments, enabling technologies, and management practices that is ...

Process analytical technology and advanced process control strategies can be applied to either batch or continuous manufacturing of solid-dosage drugs. Forward-thinking oral solid-dosage (OSD) drug ...

This paper uses Virtual Fabrication to assess the Imec 7nm node (iN7) Self-Aligned Quadruple Patterning (SAQP) integration scheme for the 16nm half-pitch Metal 2 line formation. We first present the ...

Coal-fired power plants can significantly improve wet limestone scrubbing with advanced process control. One optimization system implemented at a Japanese facility utilized enhanced regulatory control ...